000 00437nam a2200157Ia 4500
008 241206s9999||||xx |||||||||||||| ||und||
020 _a9780071204767
_c67.8
040 _beng
_cSSK Library
_erda
082 _a621.381/HSU
100 _a Tai-Ran Hsu -
245 0 _aMems & Microsystems Design And Manufacture
260 _b Mcgraw Hill
_c©2002
942 _2Dewey Decimal Classification
_cBOOK
_nNo
999 _c16821
_d16821
003 OSt
005 20241206223256.0